Surface Science

PHI Genesis

PHI GENESIS provides a new user interface experience that enables intuitive, easy and fully automated operation of the high-performance instrument with a new UI.

This interface allows access to all necessary functions to setup routine and advanced multi-technique acquisitions within a single screen, while retaining functions such as navigation using intro photo and 100% accurate positioning from X-ray induced secondary electron images (SXI).


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Application Notes

PHI 710

PHI 710 scanning Auger electron spectrometer is the only AES instrument in the world that specified < 8 nm of Auger spatial resolution. PHI 710 is equipped with an acoustic enclosure box which leads Auger analysis at X 500,000 magnification at a low-drift condition which has not achieved before. It means that PHI 710 guarantees a real nano-scale AES analysis on the sample which has very small features. Read More

Application Notes


Ulvac-PHI’s patented Parallel Imaging MS/MS mass spectrometer provides superior sensitivity, low spectral background, unique ability to image highly topographic surfaces, high mass accuracy and mass resolution, and unambiguous peak identification with parallel tandem MS imaging capability. The PHI nanoTOF 3 can be configured with a wide variety of options to optimize performance for organic materials, inorganic materials, or both, depending on customer requirements.

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Application Notes

Stylus Profiler

Stylus Profilers from KLA offers industry-leading high resolution 2D & 3D profiling and are the most versatile stylus profiler on the market—capable of serving various industries in research and development and production measurements. The KLA’s Stylus Profiler have the capability to measure a wide range of applications in 2D and 3D, from nanometre to millimetre steps, high resolution roughness, soft materials, thin film stress, profile stitching and many additional features in an easy-to-use platform. Read More

Optical Profiler

The optical surface interferometer from KLA’s surface metrology product line uses non-contact, white light optical interferometry and differentiates itself with an innovative yet simple user interface. The KLA’s optical profiler features a powerful suite of functions to support the broadest range of applications in R&D and production, measuring texture, step height/film thickness, and form. The KLA’s optical profiler are used in a variety of industries: LED, power devices, medical devices, MEMS, semiconductor, solar, and precision surfaces. Read More