The PHI Genesis is the latest generation of PHI’s highly successful multi-technique XPS product line with PHI’s patented, monochromatic, micro-focused, scanning X-ray source. The fully integrated multi-technique platform of the PHI Genesis offers an array of optional excitation sources, sputter ion sources, sample treatment and transfer capabilities.
It is an fully automated system with auto-tuning, calibration and multiple parking positions for high throughput.
PHI Genesis offers high sensitivity and high throughput for large area and small area down to 5 µm and unique high-throughput non-destructive depth profiling using optional hard X-ray Cr source.
Application Notes