VersaProbe III is PHI’s patented, monochromatic, micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance. Spectroscopy, depth profiling and imaging can all be performed over the full range of x-ray beam sizes including the minimum x-ray beam size of less than 10 µm.
Application Notes
The PHI 710 Scanning Auger Nanoprobe is a unique, high performance Auger Electron Spectroscopy (AES) instrument that provides elemental and chemical state information from sample surfaces and nano-scale features, thin films, and interfaces. Read More
Application Notes
PHI’s patented TRIFT mass spectrometer provides superior sensitivity, low spectral background, and the unique ability to image highly topographic surfaces. The nanoTOF II can be configured with a wide variety of options to optimize performance for organic materials, inorganic materials, or both, depending on customer requirements. Read More
Application Notes
Stylus Profilers from KLA Tencor offers industry-leading high resolution 2D & 3D profiling and are the most versatile stylus profiler on the market—capable of serving various industries in research and development and production measurements. The KLA Tencor’s Stylus Profiler have the capability to measure a wide range of applications in 2D and 3D, from nanometre to millimetre steps, high resolution roughness, soft materials, thin film stress, profile stitching and many additional features in an easy-to-use platform. Read More
The optical surface interferometer from KLA-Tencor’s surface metrology product line uses non-contact, white light optical interferometry and differentiates itself with an innovative yet simple user interface. The KLA Tencor’s optical profiler features a powerful suite of functions to support the broadest range of applications in R&D and production, measuring texture, step height/film thickness, and form. The KLA Tencor’s optical profiler are used in a variety of industries: LED, power devices, medical devices, MEMS, semiconductor, solar, and precision surfaces. Read More
